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Optical Engineering

Capacitive Focusing Method For Microlithography
Author(s): Meir Nitzan; Jack Broder; Naftali Eisenberg; Leo Levi
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Paper Details

Date Published: 1 July 1988
PDF: 3 pages
Opt. Eng. 27(7) doi: 10.1117/12.7976715
Published in: Optical Engineering Volume 27, Issue 7
Show Author Affiliations
Meir Nitzan, Jerusalem College of Technology (Israel)
Jack Broder, Jerusalem College of Technology (Israel)
Naftali Eisenberg, Jerusalem College of Technology (Israel)
Leo Levi, Jerusalem College of Technology (Israel)


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