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Optical Engineering

Development Of A High Resolution Sensor For Surface Roughness
Author(s): Kimiyuki Mitsui; Makoto Sakai; Yoshitsugu Kizuka
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Paper Details

Date Published: 1 June 1988
PDF: 5 pages
Opt. Eng. 27(6) doi: 10.1117/12.7976710
Published in: Optical Engineering Volume 27, Issue 6
Show Author Affiliations
Kimiyuki Mitsui, Ministry of International Trade and Industry (Japan)
Makoto Sakai, Tokyo Seimitu Co., Ltd. (Japan)
Yoshitsugu Kizuka, Okamoto Machine Tool Works Ltd. (Japan)


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