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Optical Engineering

Development Of A High Resolution Sensor For Surface Roughness
Author(s): Kimiyuki Mitsui; Makoto Sakai; Yoshitsugu Kizuka
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Paper Abstract

A high resolution noncontact optical sensor for surface roughness has been developed. The principle of the sensor is based on astigmatic focus error detection, which has been employed in the pickup of optical disk players. First, the measuring principle of the method and the optical system arrangement are described in detail. Then, the results obtained by this method are compared with those obtained by the precise diamond stylus method on several different types of surfaces. The light source of the newly developed apparatus is a diode laser with an output power of 2 mW and a wavelength of 790 nm. The objective lens of the sensor is a standard microscope objective, interchangeable with other objectives. The sensor is small enough for on-machine use and has shown sensitivities on the order of nanometers on diamond-turned metal mirrors. It also permits on-machine measurement of surface profiles in cases in which the object surface is mounted on a machine tool.

Paper Details

Date Published: 1 June 1988
PDF: 5 pages
Opt. Eng. 27(6) 276498 doi: 10.1117/12.7976710
Published in: Optical Engineering Volume 27, Issue 6
Show Author Affiliations
Kimiyuki Mitsui, Ministry of International Trade and Industry (Japan)
Makoto Sakai, Tokyo Seimitu Co., Ltd. (Japan)
Yoshitsugu Kizuka, Okamoto Machine Tool Works Ltd. (Japan)

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