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Optical Engineering

Electron Beam Lithography And Nanometer Structures: Fabrication Of Microzone Plates
Author(s): V. Bogli; P. Unger; H. Beneking; B. Niemann; P. Guttmann; W. Meyer-Ilse
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Paper Details

Date Published: 1 February 1988
PDF: 7 pages
Opt. Eng. 27(2) doi: 10.1117/12.7976659
Published in: Optical Engineering Volume 27, Issue 2
Show Author Affiliations
V. Bogli, Aachen Technical University (Germany)
P. Unger, Aachen Technical University (Germany)
H. Beneking, Aachen Technical University (Germany)
B. Niemann, Universitet Gottingen (Germany)
P. Guttmann, Universitet Gottingen (Germany)
W. Meyer-Ilse, Universitet Gottingen (Germany)


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