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Optical Engineering

Control Of Low Inertia Galvanometers For High Precision Laser Scanning Systems
Author(s): Francois Blais
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Paper Abstract

A high precision controller used to accurately drive low inertia galvanometer scanners is presented. Drift errors introduced by the galvanometer position sensor and its electronic driving circuit are compensated using two synchronization photodiodes or phototransistors. The effect of the temperature is analyzed, and comparisons are made with the conventional method of using an analog-to-digital converter to read the signal directly from the position sensor. Absolute accuracy of 10-5 is measured for a change of 10°C. This accuracy is limited to 10-2 when the galvanometer position sensor is used directly. Nonlinearity variations are negligible.

Paper Details

Date Published: 1 February 1988
PDF: 7 pages
Opt. Eng. 27(2) 272104 doi: 10.1117/12.7976653
Published in: Optical Engineering Volume 27, Issue 2
Show Author Affiliations
Francois Blais, National Research Council Canada (Canada)


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