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Optical Engineering

Optical Monitoring Of Nonquarterwave Stacks
Author(s): T. Skettrup
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Paper Abstract

Three methods of monitoring nonquarterwave stacks are investi-gated: the turning value method, the inflection point method, and the second-harmonic method. The advantages of these methods are that they are monochromatic and that they do not rely on any absolute measurements of transmittance during monitoring. Computer simulations of the deposition process are performed for different nonquarterwave stacks to check the accuracy of the three methods, and we investigate whether these methods can compensate for errors in thickness occurring during deposition.

Paper Details

Date Published: 1 November 1987
PDF: 7 pages
Opt. Eng. 26(11) 261175 doi: 10.1117/12.7974212
Published in: Optical Engineering Volume 26, Issue 11
Show Author Affiliations
T. Skettrup, Technical University of Denmark (Denmark)

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