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Optical Engineering

Frequency Response Characteristics Of A Mechanical Surface Profilometer
Author(s): G. A. Al-Jumaily; S. R. Wilson; K. C. Jungling; J. R. McNeil; Jean M. Bennett
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Paper Abstract

The frequency response characteristics of a mechanical surface profilometer were examined. The treatment was based on a computational model that tracks the motion of a spherical stylus as it traces a mathematically defined surface. The stylus was found to possess a nonlinear response to the surface profile. The effects of the nonlinearity on the frequency response and spatial frequency bandwidth of the stylus profilometer were examined. The model assumes that no external force acts on the stylus; therefore, effects such as surface deformation were not investigated.

Paper Details

Date Published: 1 September 1987
PDF: 6 pages
Opt. Eng. 26(9) doi: 10.1117/12.7974177
Published in: Optical Engineering Volume 26, Issue 9
Show Author Affiliations
G. A. Al-Jumaily, The University of New Mexico (United States)
S. R. Wilson, The University of New Mexico (United States)
K. C. Jungling, The University of New Mexico (United States)
J. R. McNeil, The University of New Mexico (United States)
Jean M. Bennett, Naval Weapons Center (United States)


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