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Optical Engineering

Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors
Author(s): R. A. Stern; R. C. Catura; R. Kimble; A. F. Davidsen; M. Winzenread; M. M. Blouke; R. Hayes; D. M. Walton; J. L. Culhane
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Paper Abstract

We present results of a program to enhance the ultraviolet and extreme ultraviolet response of charge-coupled devices. The ultimate goal of our program is to develop a large format device with both high and stable quantum efficiency from 100 to 3000 A that can be used as a windowless imaging detector in a space environment. Ultraviolet quantum efficiency measurements have been made for several ion-implanted and laser-annealed test CCDs specially fabricated by Tektronix for this program. Quantum efficiencies as high as 22% at 2500 A , where the absorption depth in silicon is -55 A, have been observed in one such test CCD. Quantum efficiency measurements of standard back-illuminated RCA and Tektronix CCDs are also presented.

Paper Details

Date Published: 1 September 1987
PDF: 9 pages
Opt. Eng. 26(9) doi: 10.1117/12.7974165
Published in: Optical Engineering Volume 26, Issue 9
Show Author Affiliations
R. A. Stern, Lockheed Palo Alto Research Laboratory (United States)
R. C. Catura, Lockheed Palo Alto Research Laboratory (United States)
R. Kimble, The Johns Hopkins University (United States)
A. F. Davidsen, The Johns Hopkins University (United States)
M. Winzenread, Tektronix, Inc. (United States)
M. M. Blouke, Tektronix, Inc. (United States)
R. Hayes, Tektronix, Inc. (United States)
D. M. Walton, Mullard Space Science Laboratory (United Kingdom)
J. L. Culhane, Mullard Space Science Laboratory (United Kingdom)


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