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Optical Engineering

Flash Technology For Charge-Coupled-Device Imaging In The Ultraviolet
Author(s): James R. Janesick; Dave Campbell; Tom Elliott; Taher Daud
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Paper Abstract

The introduction of the flash gate has made possible the fabrication of backside-illuminated CCDs with high sensitivity and stability throughout a wide range of ultraviolet and visible wavelengths (100 to 5000 A ). It had been determined previously that the characteristics of the oxide layer beneath the gate are critical to the ultimate achievable CCD performance. However, by creating an improved oxide layer in conjunction with the flash gate, we are now able to consistently produce CCDs with near-ideal UV performance. In the interest of transferring flash technology to industry, in this paper we present recent results and related background theory that optimize the flash gate specifically for application in the UV.

Paper Details

Date Published: 1 September 1987
PDF: 12 pages
Opt. Eng. 26(9) 269852 doi: 10.1117/12.7974163
Published in: Optical Engineering Volume 26, Issue 9
Show Author Affiliations
James R. Janesick, California Institute of Technology (United States)
Dave Campbell, California Institute of Technology (United States)
Tom Elliott, California Institute of Technology (United States)
Taher Daud, California Institute of Technology (United States)

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