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Optical Engineering

Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon
Author(s): M. P. Bruijin; J. Verhoeven; M. J. van der Wiel; W. J. Bartels
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Paper Abstract

A new type of multilayer x-ray reflection coating has been de-signed and deposited: a so-called distributed Fabry-Perot etalon, consist-ing of a normal periodic multilayer in which extra periods of only spacer material are distributed. As an example, we deposited a ReW/C multilayer (d = 22 A, 90 periods) in which 90 extra C periods (d = 22 A) were ran-domly distributed. At X = 1.54 A, the resolution X/AX was limited by sub-strate flatness and was measured to be 133 (compared to about 90 for a , regular 90 period stack). The peak reflectivity is 21%. Crucial for deposition of this structure was a reduced substrate temperature (T = -150°C). The effective roughness of the interfaces is a constant 5 A throughout the entire stack.

Paper Details

Date Published: 1 July 1987
PDF: -678 pages
Opt. Eng. 26(7) 267679 doi: 10.1117/12.7974135
Published in: Optical Engineering Volume 26, Issue 7
Show Author Affiliations
M. P. Bruijin, FOM-Institute for Atomic and Molecular Physics (Netherlands)
J. Verhoeven, FOM-Institute for Atomic and Molecular Physics (Netherlands)
M. J. van der Wiel, FOM-Institute for Atomic and Molecular Physics (Netherlands)
W. J. Bartels, Philips Research Laboratories (Netherlands)


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