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Optical Engineering

The Way To One-Half Micrometer Photolithography
Author(s): Masaomi Kameyama; Kazuo Ushida
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Paper Details

Date Published: 1 April 1987
PDF: 7 pages
Opt. Eng. 26(4) doi: 10.1117/12.7974071
Published in: Optical Engineering Volume 26, Issue 4
Show Author Affiliations
Masaomi Kameyama, Nippon Kogaku K. K. (Nikon) (Japan)
Kazuo Ushida, Nippon Kociaku K. K. (Nikon) (Japan)

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