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Optical Engineering

Practical Method For Edge Detection And Focusing For Linewidth Measurements On Wafers
Author(s): Diana Nyyssonen
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Paper Details

Date Published: 1 January 1987
PDF: 5 pages
Opt. Eng. 26(1) doi: 10.1117/12.7974026
Published in: Optical Engineering Volume 26, Issue 1
Show Author Affiliations
Diana Nyyssonen, National Bureau of Standards (United States)


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