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Optical Engineering

Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating
Author(s): Eberhard Spiller; Alan E. Rosenbluth
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Paper Abstract

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed, and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multi-layer with many layers at short wavelengths.

Paper Details

Date Published: 1 August 1986
PDF: 10 pages
Opt. Eng. 25(8) 258954 doi: 10.1117/12.7973935
Published in: Optical Engineering Volume 25, Issue 8
Show Author Affiliations
Eberhard Spiller, IBM Thomas J. Watson Research Center (United States)
Alan E. Rosenbluth, IBM Thomas J. Watson Research Center (United States)

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