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Optical Engineering

Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage
Author(s): Yves Lepetre; Ivan K. Schuller; Georges Rasigni; Rene Rivoira; Roger Philip; Pierre Dhez
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Paper Abstract

Microcleavage transmission electron microscopy (MTEM) has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique for obtaining a detailed structural picture of the multilayer in order to study long-range perpendicular thickness drifts, lateral variations, roughness, substrate quality, adherence, thermal stability, composition, and crystallinity.

Paper Details

Date Published: 1 August 1986
PDF: 6 pages
Opt. Eng. 25(8) 258948 doi: 10.1117/12.7973934
Published in: Optical Engineering Volume 25, Issue 8
Show Author Affiliations
Yves Lepetre, Argonne National Laboratory (United States)
Ivan K. Schuller, Argonne National Laboratory (United States)
Georges Rasigni, Universite Aix-Marseille III (France)
Rene Rivoira, Universite Aix-Marseille III (France)
Roger Philip, Universite Aix-Marseille III (France)
Pierre Dhez, LURE Universite de Paris-Sud (France)

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