Share Email Print
cover

Optical Engineering

Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing
Author(s): M. P. Bruijn; P. Chakraborty; H. W. van Essen; J. Verhoeven; M. J. van der Wiel
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Details

Date Published: 1 August 1986
PDF: 6 pages
Opt. Eng. 25(8) doi: 10.1117/12.7973930
Published in: Optical Engineering Volume 25, Issue 8
Show Author Affiliations
M. P. Bruijn, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
P. Chakraborty, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
H. W. van Essen, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
J. Verhoeven, FOM-Institute for Atomic and Molecular Physics (The Netherlands)
M. J. van der Wiel, FOM-Institute for Atomic and Molecular Physics (The Netherlands)


© SPIE. Terms of Use
Back to Top