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Optical Engineering

Differential Laser Heterodyne Micrometrology
Author(s): H. K. Wickramasinghe
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Paper Abstract

Heterodyne techniques have proved to be a very sensitive tool for measuring minute dynamic phase changes imposed on an optical beam. In this paper, we review the application of this powerful tool to the area of micrometrology. By using a differential geometry that measures the phase difference of reflected or transmitted light from two adjacent points on a sample, it is possible to achieve a sensitivity of 0.35 A (or 0.75 X1 0-3 rad). Results of the surface studies on several samples are presented that clearly show the ability of the technique to image monomolecular layers and other minute surface perturbations.

Paper Details

Date Published: 1 December 1985
PDF: 4 pages
Opt. Eng. 24(6) doi: 10.1117/12.7973604
Published in: Optical Engineering Volume 24, Issue 6
Show Author Affiliations
H. K. Wickramasinghe, IBM Thomas J. Watson Research Center (United States)


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