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Optical Engineering

Electron Beam Fabrication Of Computer-Generated Holograms
Author(s): Steven M. Arnold
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Paper Abstract

We report here the development of an integrated capability for writing computer-generated holograms (CGHs) using either of two commercially available electron-beam lithography systems. These binary, chrome-on-glass holograms have been used extensively for aspheric optical testing and also have applications to the interferometric recording of holograms. Algorithms are described for encoding CGHs for drawing by e-beam systems. Limitations of e-beam CGH fabrication are discussed. A self-contact lithography and ion milling process is described for con-verting chrome-on-glass holograms into 40% efficient, environmentally durable all-glass holograms.

Paper Details

Date Published: 1 August 1985
PDF: 5 pages
Opt. Eng. 24(5) doi: 10.1117/12.7973578
Published in: Optical Engineering Volume 24, Issue 5
Show Author Affiliations
Steven M. Arnold, Honeywell Physical Sciences Center (United States)

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