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Optical Engineering

Holographic Optical Processing For Submicrometer Defect Detection
Author(s): R. L. Fusek; L. H. Lin; K. Harding; S. Gustafson
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Paper Details

Date Published: 1 August 1985
PDF: 4 pages
Opt. Eng. 24(5) doi: 10.1117/12.7973567
Published in: Optical Engineering Volume 24, Issue 5
Show Author Affiliations
R. L. Fusek, Insystems, Incorporated (United States)
L. H. Lin, Insystems, Incorporated (United States)
K. Harding, Industrial Technology Institute (United States)
S. Gustafson, University of Dayton Research Institute (United States)


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