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Optical Engineering

Analysis Of Linewidth Measurement Techniques For The Purpose Of Automation
Author(s): C. P. Kirk; D. S. Moore; J. C. C. Nelson
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Paper Details

Date Published: 1 August 1985
PDF: 5 pages
Opt. Eng. 24(4) doi: 10.1117/12.7973545
Published in: Optical Engineering Volume 24, Issue 4
Show Author Affiliations
C. P. Kirk, Vickers Instruments (England)
D. S. Moore, Vickers Instruments (England)
J. C. C. Nelson, University of Leeds (England)


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