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Optical Engineering

Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision Machined Optical Surfaces
Author(s): E. L. Church; T. V. Vorburger; J. C. Wyant
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Paper Abstract

This paper compares two methods of measuring the finish of precision machined optical surfaces: the older, well-established mechanical stylus gauge and a recently developed optical gauge using interference microscopy. Results are found to be in good quantitative agreement for both random and periodic surface features, provided that appropriate filtering procedures are included in the data analysis to account for the differing transfer functions and bandwidths of the two measurement techniques. These results affirm the use of these techniques for the quantitative measurement and specification of machined optical surfaces.

Paper Details

Date Published: 1 June 1985
PDF: 8 pages
Opt. Eng. 24(3) 243388 doi: 10.1117/12.7973494
Published in: Optical Engineering Volume 24, Issue 3
Show Author Affiliations
E. L. Church, U.S. Army Armament Research and Development Center (United States)
T. V. Vorburger, National Bureau of Standards (United States)
J. C. Wyant, University of Arizona (United States)

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