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Optical Engineering

Surface Metrology
Author(s): Theodore Vorburger
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Paper Details

Date Published: 1 June 1985
PDF: 1 pages
Opt. Eng. 24(3) doi: 10.1117/12.7973491
Published in: Optical Engineering Volume 24, Issue 3
Show Author Affiliations
Theodore Vorburger, National Bureau of Standards (United States)

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