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Optical Engineering

Offner 1:1 System: Some Further Uses
Author(s): M. V.R.K. Murty
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Paper Abstract

About a decade ago, a very remarkable optical system was devised by Offner, mainly for 1:1 projection lithography of microcircuits. This system contains only two reflecting surfaces, which are spherical. The aberration properties in this system are very remarkable in that all the primary and several secondary aberrations are eliminated. The system is completely achromatic since no refraction is involved. In this short paper we make some suggestions for the use of this system in several other areas of optics.

Paper Details

Date Published: 1 April 1985
PDF: 3 pages
Opt. Eng. 24(2) 242326 doi: 10.1117/12.7973477
Published in: Optical Engineering Volume 24, Issue 2
Show Author Affiliations
M. V.R.K. Murty, Centro de Investigaciones en Optica A. C. (Mexico)

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