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Optical Engineering

Soft X-Ray Optics Using Multilayer Mirrors
Author(s): Ping Lee; Roger J. Bartlett; Don R. Kania
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Paper Abstract

Recent advances in thin film fabrication techniques have made multilayer mirrors an important new addition in the field of soft x-ray diffraction optics. A multilayer is a one-dimensional periodic structure that consists of an alternating sequence of high and low atomic number elements evaporated or sputtered onto a substrate. Characterization of these devices has been carried out on a variety of x-ray sources, including synchrotron radiation, over a large range of parameters. Extensive modeling of the diffraction characteristics of multilayers has shown that the theory of optics of thin films gives good agreement between measured and calculated diffraction profiles. Application of multilayer mirrors as normal incidence x-ray collectors, monochromators, and beam splitters is being explored.

Paper Details

Date Published: 1 February 1985
PDF: 5 pages
Opt. Eng. 24(1) 241197 doi: 10.1117/12.7973449
Published in: Optical Engineering Volume 24, Issue 1
Show Author Affiliations
Ping Lee, GA Technologies Inc. (United States)
Roger J. Bartlett, Los Alamos National Laboratory (United States)
Don R. Kania, Los Alamos National Laboratory (United States)


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