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Optical Engineering

Straightness Measurement System For Slits
Author(s): C. C. Huang; J. R. Hodor
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Paper Abstract

An optical system was developed to measure the straightness of a slit to better than 0.04 Am peak-to-peak. The slit (part of a reticle pattern) was 19 Am wide and 25 mm long, lying across the center of one face of a convex spherical lens. The system demonstrated a 0.02 Am peak-to-peak measure-ment repeatability, with a capability of achieving higher accuracy.

Paper Details

Date Published: 1 August 1984
PDF: 5 pages
Opt. Eng. 23(4) 234426 doi: 10.1117/12.7973312
Published in: Optical Engineering Volume 23, Issue 4
Show Author Affiliations
C. C. Huang, Lockheed Missiles & Space Company, Inc. (United States)
J. R. Hodor, Lockheed Missiles & Space Company, Inc. (United States)

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