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Optical Engineering

Some Observations Of The Effects Of Partial Coherence On Projection System Imagery
Author(s): Gregory C. Dente; Jeffrey S. Osgood
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Paper Abstract

Partially coherent illumination significantly affects projection system performance. Our theoretical and experimental results cover a variety of test objects imaged with different projection system assemblies, including some nonuniform sources, and show that improved optical lithography performance can be realized.

Paper Details

Date Published: 1 December 1983
PDF: 5 pages
Opt. Eng. 22(6) 226720 doi: 10.1117/12.7973228
Published in: Optical Engineering Volume 22, Issue 6
Show Author Affiliations
Gregory C. Dente, The Perkin-Elmer Corporation (United States)
Jeffrey S. Osgood, The Perkin-Elmer Corporation (United States)


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