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Optical Engineering

Application Of Zone Plates To Alignment In X-Ray Lithography
Author(s): M. Feldman; A. D. White; D. L. White
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Paper Details

Date Published: 1 April 1983
PDF: 5 pages
Opt. Eng. 22(2) doi: 10.1117/12.7973083
Published in: Optical Engineering Volume 22, Issue 2
Show Author Affiliations
M. Feldman, Bell Telephone Laboratories (United States)
A. D. White, Bell Telephone Laboratories (United States)
D. L. White, Bell Telephone Laboratories (United States)


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