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Optical Engineering

Shaped Beams For Integrated Circuit Fabrication
Author(s): Edward V. Weber
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Paper Details

Date Published: 1 April 1983
PDF: 5 pages
Opt. Eng. 22(2) doi: 10.1117/12.7973080
Published in: Optical Engineering Volume 22, Issue 2
Show Author Affiliations
Edward V. Weber, IBM Corporation (United States)


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