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Optical Engineering

State Of Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
Author(s): Wayne M. Moreau
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Paper Details

Date Published: 1 April 1983
PDF: 4 pages
Opt. Eng. 22(2) doi: 10.1117/12.7973078
Published in: Optical Engineering Volume 22, Issue 2
Show Author Affiliations
Wayne M. Moreau, International Business Machines Corporation (United States)


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