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Optical Engineering

Comparison Of Two Common Methods Of Surface Topography Evaluation
Author(s): Allen L. Gauler
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Paper Abstract

This paper compares some of the advantages and limitations of two methods used for surface topography evaluation, the dual-beam interference microscope and the stylus-type profiling instrument. Consideration is primarily limited to diamond-machined or other high quality surfaces, such as those commonly encountered on optical elements. Parameters discussed include horizontal and vertical resolution, horizontal and vertical range, and surface damage.

Paper Details

Date Published: 1 December 1982
PDF: 7 pages
Opt. Eng. 21(6) doi: 10.1117/12.7973021
Published in: Optical Engineering Volume 21, Issue 6
Show Author Affiliations
Allen L. Gauler, Los Alamos National Laboratory (United States)


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