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Optical Engineering

Calibration Of Optical Systems For Linewidth Measurements On Wafers
Author(s): D. Nyyssonen
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Paper Details

Date Published: 1 October 1982
PDF: 6 pages
Opt. Eng. 21(5) doi: 10.1117/12.7972998
Published in: Optical Engineering Volume 21, Issue 5
Show Author Affiliations
D. Nyyssonen, National Bureau of Standards (United States)

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