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Optical Engineering

Reduction Of Errors Of Microphotographic Reproductions By Optimal Corrections Of Original Masks
Author(s): Bahaa E.A. Saleh; Soheil I. Sayegh
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Paper Details

Date Published: 1 October 1981
PDF: 4 pages
Opt. Eng. 20(5) doi: 10.1117/12.7972810
Published in: Optical Engineering Volume 20, Issue 5
Show Author Affiliations
Bahaa E.A. Saleh, University of Wisconsin--Madison (United States)
Soheil I. Sayegh, University of Wisconsin--Madison (United States)

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