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Optical Engineering

Double-Beam Interferometers For Analysis Of Thin Films
Author(s): Joseph Shamir
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Paper Abstract

Three recently developed methods are described and their capabilities discussed. Each of these methods is applicable for the accurate determination of the thickness, refractive index and absorption of thin films.

Paper Details

Date Published: 1 December 1980
PDF: -800 pages
Opt. Eng. 19(6) 196801 doi: 10.1117/12.7972614
Published in: Optical Engineering Volume 19, Issue 6
Show Author Affiliations
Joseph Shamir, Israel Institute of Technology (Israel)


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