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Optical Engineering

Use Of Microdensitometers As A Basis For Highly Accurate Metrology
Author(s): H. J. Caulfield; David L. Kryger
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Paper Abstract

Microdensitometers have already solved the problem of maintaining high speed and high accuracy across large regions of space. Modifications are needed to operate with much higher speed and in the reflection mode. Experimental results confirm accuracies better than 0.1 um over areas over 40 cm.

Paper Details

Date Published: 1 October 1979
PDF: 3 pages
Opt. Eng. 18(5) 185483 doi: 10.1117/12.7972416
Published in: Optical Engineering Volume 18, Issue 5
Show Author Affiliations
H. J. Caulfield, Aerodyne Research, Inc. (United States)
David L. Kryger, Aerodyne Research, Inc. (United States)

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