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Optical Engineering

Microprocessor-Based Automatic Heterodyne Interferometer
Author(s): F. M. Mottier
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Paper Abstract

The interferometer described in this article combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time- and space-resolved subfringe measurement with better than 10 nm resolution. The instrument is primarily intended as a diagnostic tool in adaptive optics to monitor the deformable corrector mirror during operation.

Paper Details

Date Published: 1 October 1979
PDF: 5 pages
Opt. Eng. 18(5) 185464 doi: 10.1117/12.7972412
Published in: Optical Engineering Volume 18, Issue 5
Show Author Affiliations
F. M. Mottier, United Technologies Research Center (United States)

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