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Optical Engineering

Piezoelectric Inchworm Operation in a Vacuum
Author(s): A. W. Hartman
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Paper Abstract

An "inchworm"-type piezoelectric displacement device has been tested for operation in a vacuum. Comparative data are given for its operation at two pressures (1 atmosphere and 10-6 to 1O-7 torr), three loads (0, 8, 15 N), and four speeds in the range 0.5 to 50 micrometers per second. The results are such that the device is now being applied successfully to drive an X-Y stage in a scanning electron microscope (SEM).

Paper Details

Date Published: 1 December 1978
PDF: 2 pages
Opt. Eng. 17(6) 176645 doi: 10.1117/12.7972297
Published in: Optical Engineering Volume 17, Issue 6
Show Author Affiliations
A. W. Hartman, National Bureau of Standards (United States)


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