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Optical Engineering

Development of a Brewster's Angle Spectrophotometer
Author(s): William E. Goetz; Ralph N. Jackson
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Paper Abstract

A variety of reflectance techniques have been developed to determine the thickness of thin transparent films on silicon substrates 1,2 These techniques are based on the way incident radiation is reflected from air-film and film-substrate interfaces. These reflectance techniques are ideally suited to measuring films ranging in thickness from approximately 500 A to many thousands of angstroms. The absolute reflectivity technique measures the reflectance at several wavelengths and, by matching the curve as measured to the theoretical, the actual film thickness can be determined. A refined version of the absolute reflectivity technique is the Brewster's angle spectrophotometer. This article describes the development phase for an automatic Brewster's angle spectrophotometer and discusses the performance of the instrument. The optical and mechanical layouts and photographs depict the choice of implementation.

Paper Details

Date Published: 1 December 1978
PDF: 4 pages
Opt. Eng. 17(6) 176631 doi: 10.1117/12.7972294
Published in: Optical Engineering Volume 17, Issue 6
Show Author Affiliations
William E. Goetz, IBM Federal Systems Division (United States)
Ralph N. Jackson, IBM Federal Systems Division (United States)

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