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Optical Engineering

A Step Height Interferometer with One Nanometer Resolution
Author(s): A. W. Hartman
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Paper Abstract

An interferometer is described for the measurement of thin film steps. The instrument is a double-pass polarization interferometer and has a resolution of one nanometer. It is selfcontained and features simplicity in construction and operation. Measurements illustrating its performance are given.

Paper Details

Date Published: 1 April 1976
PDF: 4 pages
Opt. Eng. 15(2) 152180 doi: 10.1117/12.7971942
Published in: Optical Engineering Volume 15, Issue 2
Show Author Affiliations
A. W. Hartman, National Bureau of Standards (United States)


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