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Optical Engineering

A Non-Contacting Length Comparator with 10 Nanometer Precision
Author(s): A. W. Hartman; F. W. Rosberry; J. Arol Simpson
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Paper Abstract

A non-contacting length comparator utilizing two specially designed photo-electric micro-scopes has been constructed. Performance tests of this comparator, using lapped and polished steel surfaces demonstrate a resolution of -1 nanometer, a precision of--10 nanometers, and a linear range in excess of 50 micrometers.

Paper Details

Date Published: 1 June 1973
PDF: 7 pages
Opt. Eng. 12(3) 120395 doi: 10.1117/12.7971639
Published in: Optical Engineering Volume 12, Issue 3
Show Author Affiliations
A. W. Hartman, National Bureau of Standards (United States)
F. W. Rosberry, National Bureau of Standards (United States)
J. Arol Simpson, National Bureau of Standards (United States)

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