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Optical Engineering

Laser patterning system for integrated optics and storage applications
Author(s): Mahadev G. Lad; Goureesh M. Naik; Ananth Selvarajan
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Paper Abstract

A computer-controlled laser writing system for optical integrated circuits and data storage is described. The system is characterized by holographic (649F) and high-resolution plates. A minimum linewidth of 2.5 μm is obtained by controlling the system parameters. We show that this system can also be used for data storage applications

Paper Details

Date Published: 1 April 1993
PDF: 5 pages
Opt. Eng. 32(4) doi: 10.1117/12.61289
Published in: Optical Engineering Volume 32, Issue 4
Show Author Affiliations
Mahadev G. Lad, Indian Institute of Science (India)
Goureesh M. Naik, Indian Institute of Science (India)
Ananth Selvarajan, Indian Institute of Science (India)

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