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Optical Engineering

Numerical calculation of ellipsometric spectra of layers with arbitrary refractive index profiles
Author(s): Sang-Youl Kim
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Paper Abstract

A method of spectroellipsometric analysis to calculate the effects of inhomogeneous layers with arbitrary refractive index profiles along the surtace normal is proposed. The expressions presented by Charmet and de Gennes in 1983 are extended to include the effects of local perturbations around the interface inside both the substrate region and the ambient medium region. The first-order perturbation is considered and the solutions are given in terms of definite integrals. Computer calculations show that deviations of the Δ and ψ spectra increase in proportion to the total amount of local perturbations. The results are compared with those of the differential program and the conventional technique of simulation and the practicality of this method is discussed.

Paper Details

Date Published: 1 January 1993
PDF: 6 pages
Opt. Eng. 32(1) doi: 10.1117/12.60080
Published in: Optical Engineering Volume 32, Issue 1
Show Author Affiliations
Sang-Youl Kim, Ajou Univ. (South Korea)


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