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Optical Engineering

Film/substrate/vacuum-chuck interactions during spin-coating
Author(s): Dunbar P. Birnie; Brian J.J. Zelinski; Stuart P. Marvel; Sharon M. Melpolder; Ronald L. Roncone
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Paper Abstract

Thickness variations that are associated with the vacuum chuck were observed in wet-chemical-derived dielectric films applied by the spin-coating technique. These thickness variations are controlled by factors such as the thermal properties of the substrate material, the evaporation behavior of the coating solution, and the physical design of the vacuum chuck. Atechnique is described for evaluating the magnitude ofthis effect.

Paper Details

Date Published: 1 September 1992
PDF: 9 pages
Opt. Eng. 31(9) doi: 10.1117/12.59901
Published in: Optical Engineering Volume 31, Issue 9
Show Author Affiliations
Dunbar P. Birnie, Univ. of Arizona (United States)
Brian J.J. Zelinski, Univ. of Arizona (United States)
Stuart P. Marvel, Univ. of Arizona (United States)
Sharon M. Melpolder, Eastman Kodak Co. (United States)
Ronald L. Roncone, Univ. of Arizona (United States)

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