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Optical Engineering

Optical micromachined pressure sensor for aerospace applications
Author(s): Diogenes Thomas Angelidis; Philip J. Parsons
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Paper Abstract

An optical pressure sensor has been designed using silicon micromachining technology. A resonant silicon beam is mounted above a diaphragm and its resonant frequency changes with applied pressure. The sensor is temperature compensated by way of a second pressure-insensitive resonator. Both resonators are optically addressed via the same optical fiber. The sensor is designed to give an overall accuracy of 0.05% full-scale pressure, which is currently between 130 kPa or 3 MPa. Optical technology allows the optical pressure sensor to operate in a harsh aerospace environment where electronic pressure sensors cannot survive.

Paper Details

Date Published: 1 August 1992
PDF: 5 pages
Opt. Eng. 31(8) doi: 10.1117/12.58838
Published in: Optical Engineering Volume 31, Issue 8
Show Author Affiliations
Diogenes Thomas Angelidis, Schlumberger Industries (United Kingdom)
Philip J. Parsons, Schlumberger Industries (United Kingdom)

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