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Optical Engineering

Production and measurement of superpolished surfaces
Author(s): Johannes van Wingerden; Hans Jan Frankena; Bertram A. van der Zwan
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Paper Abstract

The influence of polishing time on the roughness of ultrasmooth bowl-feed-polished surfaces is studied. A large improvement of the surface quality is obtained within the first 10 mm, but increasing the polishing time from 10 to 60 mm did not yield a significant difference. A Linnik interference miscroscope, adapted for phase-shifting interferometry, was used for roughness measurements. Preliminary measurements have been performed with a setup determining the scattered intensity within a small solid angle. This relatively simple setup, which is also suitable for uncoated glass surfaces, clearly showed the improvement of surface quality by bowl-feed polishing.

Paper Details

Date Published: 1 May 1992
PDF: 7 pages
Opt. Eng. 31(5) doi: 10.1117/12.56151
Published in: Optical Engineering Volume 31, Issue 5
Show Author Affiliations
Johannes van Wingerden, Delft Univ. of Technology (Netherlands)
Hans Jan Frankena
Bertram A. van der Zwan, TNO Institute of Applied Physics (Netherlands)

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