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Optical Engineering

Multifunctional holographic elements for surface measurements
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Paper Abstract

A novel single multifunctional holographic optical element is incorporated into a surface measurement system. As a result the system is lightweight, compact, and simpler than conventional ones. Numerical calculation reveals that submicron resolutions are possible both in the horizontal and vertical directions. Finally, experimental results demonstrate the feasibility of the approach.

Paper Details

Date Published: 1 February 1992
PDF: 6 pages
Opt. Eng. 31(2) doi: 10.1117/12.56078
Published in: Optical Engineering Volume 31, Issue 2
Show Author Affiliations
Erez Hasman, Weizmann Institute of Science (Israel)
Nir Davidson, Weizmann Institute of Science (Israel)
Asher A. Friesem, Weizmann Institute of Science (Israel)

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