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Optical Engineering

Phase shifting in an oblique incidence interferometer
Author(s): Doris Boebel; Bernd Packross; Hans J. Tiziani
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Paper Abstract

The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.

Paper Details

Date Published: 1 December 1991
PDF: 5 pages
Opt. Eng. 30(12) doi: 10.1117/12.56025
Published in: Optical Engineering Volume 30, Issue 12
Show Author Affiliations
Doris Boebel, Robert Bosch GmbH (Germany)
Bernd Packross
Hans J. Tiziani, Univ. Stuttgart (Germany)

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