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Optical Engineering

Resolving interferometric step-height measurement ambiguities using a priori information
Author(s): John E. Greivenkamp; Kevin G. Sullivan; Russell J. Palum
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Paper Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. The use of a priori information in resolving the ambiguities found in interferometric step-height measurements is explored. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Opt. Eng. 30(11) doi: 10.1117/12.55983
Published in: Optical Engineering Volume 30, Issue 11
Show Author Affiliations
John E. Greivenkamp, Univ. of Arizona (United States)
Kevin G. Sullivan, Univ. of Rochester (United States)
Russell J. Palum, Eastman Kodak Co. (United States)

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