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Optical Engineering

A 128 X 128 frame-addressed deformable mirror spatial light modulator
Author(s): R. Mark Boysel
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Paper Abstract

We describe the design, fabrication, and performance of the frame-addressed spatial light modulator (FASLM), a frame-updated 128 x 128 deformable mirror device (DMD) spatial light modulator(SLM). This new DMD consists of a 128 x 128 array of mirror elements addressed by an underlying virtual phase CCD array. Each mirror element consists of four cantilever beam mirrors attached to a central pillar, allowing contiguous placement of the elements. The FASLM operates at higher speed (up to 4-kHz frame rate with 100% pixel addressing) and with a higher optical duty cycle (96%) than previous DMD SLMs.

Paper Details

Date Published: 1 September 1991
PDF: 6 pages
Opt. Eng. 30(9) doi: 10.1117/12.55946
Published in: Optical Engineering Volume 30, Issue 9
Show Author Affiliations
R. Mark Boysel, Texas Instruments Inc. (United States)

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