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Optical Engineering

Fabrication of high-resolution multilayer reflection zone plate microlense for the soft x-ray range
Author(s): Chantal G. Khan Malek; F. R. Ladan; Jean-Rene Rivoira
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Paper Abstract

The fabrication of linear, circular, and elliptical reflective zone plate lenses by a multistep process using microfabrication technologies is reported. The diffractive elements were generated by electron-beam lithography on a Mo/C multilayer mirror obtained by means of the triode sputtering technique. The patterns were transferred anisotropically into the multilayer mirror by reactive ion etching in a fluorinated plasma. An intermediate metallic mask made by the lift-off process was used for the transfer process. The groove depth could be monitored by following the reflectivity ofthe structure with a helium-neon laser during etching. Linear, circular (with 0.4-μm outer zones), and elliptical Fresnel zone plates (with 0.8-μ.m outer zones) were produced. Test patterns with a 50-nm top and 90-nm bottom resolution were produced. The groove profile and dimensional control were also investigated.

Paper Details

Date Published: 1 August 1991
PDF: 5 pages
Opt. Eng. 30(8) doi: 10.1117/12.55909
Published in: Optical Engineering Volume 30, Issue 8
Show Author Affiliations
Chantal G. Khan Malek, CNET-CNRS (France)
F. R. Ladan, Ctr. National de la Recherche Scientifique (France)
Jean-Rene Rivoira, Univ. d'Aix-Marseille III (France)

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