Share Email Print
cover

Optical Engineering

Manufacture of blazed zone plates in germanium for use in the 10 micrometer spectral region
Author(s): Michael C. Hutley; Richard F. Stevens; S. J. Wilson
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

Blazed zone plates have been manufactured in germanium. A suitable surface relief pattern was first generated by recording in photoresist the circular fringes transmitted by a Fabry-Pérot interferometer. By scanning the fringe pattern and recording a series of exposures, we were able to generate a triangular groove profile. This was then transferred to the germanium substrate by ion-beam etching. By this means, diffraction efficiencies in excess of 80% have been achieved at 10μm for zone plates working in transmission and on axis.

Paper Details

Date Published: 1 July 1991
PDF: 6 pages
Opt. Eng. 30(7) doi: 10.1117/12.55876
Published in: Optical Engineering Volume 30, Issue 7
Show Author Affiliations
Michael C. Hutley, National Physical Lab. (United Kingdom)
Richard F. Stevens, National Physical Lab. (United Kingdom)
S. J. Wilson, National Physcial Lab. (United Kingdom)


© SPIE. Terms of Use
Back to Top