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Optical Engineering

Refractive analog for modeling electrostatic ion lenses
Author(s): William C. Sweatt; Paul A. Miller
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Paper Abstract

Electrostatic lenses are used extensively to control charged-particle beams. In a particular application to ion beam lithography for microelectronics fabrication, it was necessary to perform extensive calculations of the focal properties of cylindrically symmetric ion lenses. We have found that the imaging properties of cylindrical electrostatic ion lenses can be modeled accurately and efficiently by a series of refractive optical lenses. This is a key step toward the use of mature optical design tools for the design of systems that focus charged particles.

Paper Details

Date Published: 1 May 1991
PDF: 7 pages
Opt. Eng. 30(5) doi: 10.1117/12.55839
Published in: Optical Engineering Volume 30, Issue 5
Show Author Affiliations
William C. Sweatt, Sandia National Labs. (United States)
Paul A. Miller, Sandia National Labs. (United States)

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