Share Email Print

Optical Engineering

Improved Fourier transform profilometry for the automatic measurement of three-dimensional object shapes
Author(s): Jian Li; Xianyu Su; Lurong Guo
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

By using a defocused optical field with a Ronchi grating to get a quasi-sine optical field and by using a grating ii phase shifting technique, the fundamental spectrum modulated by the object height distribution can theoretically be extended from 0 to 2f0 ( f0 is the carrier frequency of the optical field) without overlapping the zero component and other higher spectra. Consequently, the measurable slope of height variation can be extended to nearly three times that of the unimproved Fourier transform profilometry method. This paper gives the theory and experiment results of the improved Fourier transform profilometry.

Paper Details

Date Published: 1 December 1990
PDF: 6 pages
Opt. Eng. 29(12) doi: 10.1117/12.55746
Published in: Optical Engineering Volume 29, Issue 12
Show Author Affiliations
Jian Li, Univ. of Connecticut (United States)
Xianyu Su, Sichuan Univ. (China)
Lurong Guo, Sichuan Univ. (China)

© SPIE. Terms of Use
Back to Top